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Micro mechanical systems : principles and technology

Record Type:	Electronic resources : monographic
Title Information:	principles and technology
Secondary Intellectual Responsibility:	FukudaT., 1948-
Secondary Intellectual Responsibility:	MenzW.,
Place of Publication:	Amsterdam
Published:	Elsevier;
Year of Publication:	1998.
Description:	viii, 268 p.ill. : 25 cm.;
Series:	Handbook of sensors and actuators
Subject:	Microelectromechanical systems - Handbooks, manuals, etc. -
Online resource:	http://www.sciencedirect.com/science/book/9780444823632
ISBN:	9780444823632electronic bk.
ISBN:	9780444823632

Micro mechanical systems : principles and technology
Micro mechanical systems : principles and technology / edited by T. Fukuda and W. Menz. - Amsterdam : Elsevier, 1998.. - viii, 268 p. ; ill. ; 25 cm.. - (Handbook of sensors and actuators ; v. 6).
Includes bibliographical references..
ISBN 9780444823632ISBN 9780444823632
Microelectromechanical systems -- Handbooks, manuals, etc.

Fukuda, T.

Micro mechanical systems : principles and technology
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