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Fundamental principles of engineering nanometrology

Record Type:	Electronic resources : monographic
Author:	LeachR. K.,
Place of Publication:	Oxford, OX
Published:	Elsevier, William Andrew;
Year of Publication:	2014.
Edition:	2nd ed.
Description:	xxi, 361 p.ill. : 25 cm.;
Series:	Micro & nano technologies series
Subject:	Metrology. -
Subject:	Microtechnology. -
Subject:	Nanotechnology. -
Online resource:	http://www.sciencedirect.com/science/book/9781455777532
ISBN:	9781455777532electronic bk.
ISBN:	9781455777532

Fundamental principles of engineering nanometrology
Leach, R. K.

Fundamental principles of engineering nanometrology / Richard Leach. - 2nd ed.. - Oxford, OX : Elsevier, William Andrew, 2014.. - xxi, 361 p. ; ill. ; 25 cm.. - (Micro & nano technologies series).
Includes bibliographical references and index..
ISBN 9781455777532ISBN 9781455777532
Metrology.Microtechnology.Nanotechnology.

Fundamental principles of engineering nanometrology
LDR:00788nlm a2200253 450 001 313354
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010 1 $a 9781455777532 $b electronic bk.
010 1 $a 9781455777532
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101 0 $a eng
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135 $a v
200 1 $a Fundamental principles of engineering nanometrology $f Richard Leach.
204 1 $a electronic resource
205 $a 2nd ed.
210 $a Oxford, OX $d 2014. $c Elsevier, William Andrew
215 1 $a xxi, 361 p. $c ill. $d 25 cm.
225 2 $a Micro & nano technologies series
320 $a Includes bibliographical references and index.
410 0 $1 2001 $a Micro & nano technologies series
606 $a Metrology. $2 lc $3 375695
606 $a Microtechnology. $2 lc $3 297520
606 $a Nanotechnology. $3 126215
676 $v 23 $a 620.50287
680 $a T174.7 $b .L42 2014
700 1 $a Leach $b R. K. $3 375694
856 7 $u http://www.sciencedirect.com/science/book/9781455777532

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