Microtechnology.

[NT 60487] Overview

[NT 60478] Works:	2 [NT 60520] works in 2 [NT 60521] publications in 1 [NT 60522] languages

[NT 60480] Titles

Hot embossing : theory and technology of microreplication [NT 59711] by: Worgull, Matthias. ([NT 8598] Electronic resources)

Fundamental principles of engineering nanometrology [NT 59711] by: Leach, R. K. ([NT 8598] Electronic resources)