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New approaches to image processing based failure analysis of nano-scale ULSI devices

Record Type:	Electronic resources : monographic
Author:	ZalevskyZeev.,
Secondary Intellectual Responsibility:	LivshitsPavel.,
Secondary Intellectual Responsibility:	GurEran.,
Place of Publication:	Amsterdam
Published:	Elsevier/William Andrew;
Year of Publication:	2014.
Description:	101 p.ill. : 23 cm.;
Series:	Micro & nano technologies series
Subject:	Integrated circuits - Ultra large scale integration -
Subject:	Nanoelectronics. -
Subject:	Microelectronics. -
Online resource:	http://www.sciencedirect.com/science/book/9780323241434
Summary:	New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.
ISBN:	9780323241434electronic bk.
ISBN:	9780323241434

New approaches to image processing based failure analysis of nano-scale ULSI devices
Zalevsky, Zeev.

New approaches to image processing based failure analysis of nano-scale ULSI devices / Zeev Zalevsky, Pavel Livshits, Eran Gur. - Amsterdam : Elsevier/William Andrew, 2014.. - 101 p. ; ill. ; 23 cm.. - (Micro & nano technologies series).
Includes bibliographical references..
ISBN 9780323241434ISBN 9780323241434
Integrated circuitsNanoelectronics.Microelectronics. -- Ultra large scale integration

Livshits, Pavel.

New approaches to image processing based failure analysis of nano-scale ULSI devices
LDR:01457clm a2200289 450 001 303509
005 20140701165341.0
009 a(OCoLC)875166733
009 14000370
010 1 $a 9780323241434 $b electronic bk.
010 1 $a 9780323241434
100 $a 20150126d2014 u y0engy50 b
101 0 $a eng
102 $a nl
105 $a a a 000yy
135 $a v
200 1 $a New approaches to image processing based failure analysis of nano-scale ULSI devices $f Zeev Zalevsky, Pavel Livshits, Eran Gur.
204 1 $a electronic resource
210 $a Amsterdam $d 2014. $c Elsevier/William Andrew
215 1 $a 101 p. $c ill. $d 23 cm.
225 2 $a Micro & nano technologies series
320 $a Includes bibliographical references.
330 $a New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.
606 $a Integrated circuits $x Ultra large scale integration $x Testing. $2 lc $3 361610
606 $a Nanoelectronics. $3 224131
606 $a Microelectronics. $3 148367
676 $a 621.4 $v 23
680 $a TK7874.76 $b .Z384 2014
700 1 $a Zalevsky $b Zeev. $3 361607
702 1 $a Livshits $b Pavel. $3 361608
702 1 $a Gur $b Eran. $3 361609
801 0 $ atw $c 20141127
801 1 $ atw $c 20141127
856 7 $2 http $u http://www.sciencedirect.com/science/book/9780323241434