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Ceramic thick films for MEMS and microdevices

Record Type:	Electronic resources : monographic
Author:	DoreyRobert A.,
Place of Publication:	Waltham, [MA]
Published:	William Andrew;
Year of Publication:	2012.
Description:	xviii, 191 p.ill. : 24 cm.;
Series:	Micro and nano technologies series
Subject:	Thick-film circuits - Design and construction. -
Subject:	Microelectromechanical systems - Design and construction. -
Subject:	Nanoelectronics. -
Online resource:	http://www.sciencedirect.com/science/book/9781437778175
ISBN:	9781437778175electronic bk.
ISBN:	9781437778175

Ceramic thick films for MEMS and microdevices
Dorey, Robert A.

Ceramic thick films for MEMS and microdevices / Robert A. Dorey. - Waltham, [MA] : William Andrew, 2012.. - xviii, 191 p. ; ill. ; 24 cm.. - (Micro and nano technologies series).
Includes bibliographical references (p. 183-185) and index..
ISBN 9781437778175ISBN 9781437778175
Thick-film circuitsMicroelectromechanical systemsNanoelectronics. -- Design and construction. -- Design and construction.

Ceramic thick films for MEMS and microdevices
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856 7 $u http://www.sciencedirect.com/science/book/9781437778175

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