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Ceramic thick films for MEMS and microdevices

紀錄類型:	書目-電子資源 : 單行本
作者:	DoreyRobert A.,
出版地:	Waltham, [MA]
出版者:	William Andrew;
出版年:	2012.
面頁冊數:	xviii, 191 p.ill. : 24 cm.;
集叢名:	Micro and nano technologies series
標題:	Thick-film circuits - Design and construction. -
標題:	Microelectromechanical systems - Design and construction. -
標題:	Nanoelectronics. -
電子資源:	http://www.sciencedirect.com/science/book/9781437778175
ISBN:	9781437778175electronic bk.
ISBN:	9781437778175

Ceramic thick films for MEMS and microdevices
Dorey, Robert A.

Ceramic thick films for MEMS and microdevices / Robert A. Dorey. - Waltham, [MA] : William Andrew, 2012.. - xviii, 191 p. ; ill. ; 24 cm.. - (Micro and nano technologies series).
Includes bibliographical references (p. 183-185) and index..
ISBN 9781437778175ISBN 9781437778175
Thick-film circuitsMicroelectromechanical systemsNanoelectronics. -- Design and construction. -- Design and construction.

Ceramic thick films for MEMS and microdevices
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