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Plasma-aided nanofabrication : from plasma sources to nanoassembly
[NT 42944] Record Type:
[NT 1579] Language materials, printed : [NT 40817] monographic
[NT 47348] Title Information:
from plasma sources to nanoassembly
[NT 47261] Author:
OstrikovKostya,
[NT 47353] Alternative Intellectual Responsibility:
XuShuyan,
[NT 47351] Place of Publication:
Weinheim
[NT 47263] Published:
Wiley-VCH;
[NT 47352] Year of Publication:
c2007
[NT 47264] Description:
xiii, 300 p.ill. (some col.) : 25 cm.;
[NT 47266] Subject:
Plasma engineering. -
[NT 47266] Subject:
Nanostructured materials. -
[NT 47266] Subject:
Manufacturing processes. -
[NT 47266] Subject:
Low temperature plasmas. -
[NT 47265] Notes:
Includes bibliographical references(p.283-296) and index.
[NT 50961] ISBN:
3527406336bound
[NT 50961] ISBN:
9783527406333bound
Plasma-aided nanofabrication : from plasma sources to nanoassembly
Ostrikov, Kostya
Plasma-aided nanofabrication
: from plasma sources to nanoassembly / Kostya Ostrikov, Shuyan Xu - Weinheim : Wiley-VCH, c2007. - xiii, 300 p. ; ill. (some col.) ; 25 cm..
Includes bibliographical references(p.283-296) and index..
ISBN 3527406336ISBN 9783527406333
Plasma engineering.Nanostructured materials.Manufacturing processes.Low temperature plasmas.
Xu, Shuyan
Plasma-aided nanofabrication : from plasma sources to nanoassembly
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