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Sputtering materials for VLSI and thin film devices

[NT 42944] Record Type:	[NT 8598] Electronic resources : [NT 40817] monographic
[NT 47261] Author:	SarkarJaydeep,
[NT 47351] Place of Publication:	Norwich, N.Y.
[NT 47263] Published:	William Andrew; Elsevier Science [distributor];
[NT 47352] Year of Publication:	2011.
[NT 47264] Description:	x, 603 p.ill. : 25 cm.;
[NT 47266] Subject:	Microelectronics - Materials. -
[NT 47266] Subject:	Flat panel displays - Materials. -
[NT 47266] Subject:	Sputtering (Physics) -
[NT 51458] Online resource:	http://www.sciencedirect.com/science/book/9780815515937
[NT 50961] ISBN:	9780815515937electronic bk.
[NT 50961] ISBN:	9780815515937

Sputtering materials for VLSI and thin film devices
Sarkar, Jaydeep

Sputtering materials for VLSI and thin film devices / by Jaydeep Sarkar. - Norwich, N.Y. : William Andrew, 2011.. - x, 603 p. ; ill. ; 25 cm..
Includes bibliographical references and index..
ISBN 9780815515937ISBN 9780815515937
MicroelectronicsFlat panel displaysSputtering (Physics) -- Materials. -- Materials.

Sputtering materials for VLSI and thin film devices
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009 a(OCoLC)660539201
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010 1 $a 9780815515937
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200 1 $a Sputtering materials for VLSI and thin film devices $f by Jaydeep Sarkar.
204 1 $a electronic resource
210 $a Norwich, N.Y. $a Oxford $d 2011. $c William Andrew $c Elsevier Science [distributor]
215 1 $a x, 603 p. $c ill. $d 25 cm.
320 $a Includes bibliographical references and index.
606 $a Microelectronics $x Materials. $2 lc $3 360251
606 $a Flat panel displays $x Materials. $2 lc $3 360252
606 $a Sputtering (Physics) $2 lc $3 360253
676 $a 621.381 $v 22
680 $a TK7874 $b .S273 2014
700 1 $a Sarkar $b Jaydeep $c Materials scientist $3 360250
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801 1 $ atw $c 20141127
856 7 $2 http $u http://www.sciencedirect.com/science/book/9780815515937

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