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Smart sensors and MEMS : intelligent devices and microsystems for industrial applications

[NT 42944] Record Type:	[NT 8598] Electronic resources : [NT 40817] monographic
[NT 47348] Title Information:	intelligent devices and microsystems for industrial applications
[NT 47354] Secondary Intellectual Responsibility:	NihtianovStoyan.,
[NT 47354] Secondary Intellectual Responsibility:	LuqueA.,
[NT 47351] Place of Publication:	Oxford
[NT 47263] Published:	Woodhead Publishing;
[NT 47352] Year of Publication:	2014.
[NT 47264] Description:	xxii, 538 p.ill. : 24 cm.;
[NT 47298] Series:	Woodhead Publishing series in electronic and optical materials
[NT 47266] Subject:	Detectors - Industrial applications. -
[NT 47266] Subject:	Microelectromechanical systems - Industrial applications. -
[NT 51458] Online resource:	http://www.sciencedirect.com/science/book/9780857095022
[NT 50961] ISBN:	9780857095022electronic bk.
[NT 50961] ISBN:	9780857095022

Smart sensors and MEMS : intelligent devices and microsystems for industrial applications
Smart sensors and MEMS : intelligent devices and microsystems for industrial applications / edited by Stoyan Nihtianov and Antonio Luque. - Oxford : Woodhead Publishing, 2014.. - xxii, 538 p. ; ill. ; 24 cm.. - (Woodhead Publishing series in electronic and optical materials ; no. 51).
Includes bibliographical references and index..
ISBN 9780857095022ISBN 9780857095022
DetectorsMicroelectromechanical systems -- Industrial applications. -- Industrial applications.

Nihtianov, Stoyan.

Smart sensors and MEMS : intelligent devices and microsystems for industrial applications
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