Thin film devices - Design and construction.

[NT 60487] Overview

[NT 60478] Works:	2 [NT 60520] works in 2 [NT 60521] publications in 1 [NT 60522] languages

[NT 60480] Titles

Handbook of thin film deposition : techniques, processes, and technologies [NT 59711] by: Seshan, Krishna. ([NT 8598] Electronic resources)

PVD for microelectronics : sputter deposition applied to semiconductor manufacturing [NT 59711] by: Rossnagel, Stephen M.; Powell, Ronald A. ([NT 8598] Electronic resources)