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PVD for microelectronics : sputter deposition applied to semiconductor manufacturing

紀錄類型:	書目-電子資源 : 單行本
副題名:	sputter deposition applied to semiconductor manufacturing
作者:	PowellRonald A.,
其他作者:	RossnagelStephen M.,
出版地:	San Diego
出版者:	Academic Press;
出版年:	c1999.
面頁冊數:	xiii, 419 p.ill. : 24 cm.;
集叢名:	Thin films
標題:	Thin film devices - Design and construction. -
標題:	Vapor-plating. -
標題:	Thin films. -
電子資源:	http://www.sciencedirect.com/science/book/9780125330268
ISBN:	9780125330268electronic bk.
ISBN:	9780125330268

PVD for microelectronics : sputter deposition applied to semiconductor manufacturing
Powell, Ronald A.

PVD for microelectronics : sputter deposition applied to semiconductor manufacturing / Ronald A. Powell, Stephen M. Rossnagel. - San Diego : Academic Press, c1999.. - xiii, 419 p. ; ill. ; 24 cm.. - (Thin films ; v. 26).
Includes bibliographical references and indexes..
ISBN 9780125330268ISBN 9780125330268
Thin film devicesVapor-plating.Thin films. -- Design and construction.

Rossnagel, Stephen M.

PVD for microelectronics : sputter deposition applied to semiconductor manufacturing
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