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PVD for microelectronics : sputter deposition applied to semiconductor manufacturing

Record Type:	Electronic resources : monographic
Title Information:	sputter deposition applied to semiconductor manufacturing
Author:	PowellRonald A.,
Secondary Intellectual Responsibility:	RossnagelStephen M.,
Place of Publication:	San Diego
Published:	Academic Press;
Year of Publication:	c1999.
Description:	xiii, 419 p.ill. : 24 cm.;
Series:	Thin films
Subject:	Thin film devices - Design and construction. -
Subject:	Vapor-plating. -
Subject:	Thin films. -
Online resource:	http://www.sciencedirect.com/science/book/9780125330268
ISBN:	9780125330268electronic bk.
ISBN:	9780125330268

PVD for microelectronics : sputter deposition applied to semiconductor manufacturing
Powell, Ronald A.

PVD for microelectronics : sputter deposition applied to semiconductor manufacturing / Ronald A. Powell, Stephen M. Rossnagel. - San Diego : Academic Press, c1999.. - xiii, 419 p. ; ill. ; 24 cm.. - (Thin films ; v. 26).
Includes bibliographical references and indexes..
ISBN 9780125330268ISBN 9780125330268
Thin film devicesVapor-plating.Thin films. -- Design and construction.

Rossnagel, Stephen M.

PVD for microelectronics : sputter deposition applied to semiconductor manufacturing
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