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Wasa, Kiyotaka.

Overview

Works:	1 works in 2 publications in 1 languages

Titles

Thin film materials technology : sputtering of compound materials by: Adachi, Hideaki.; Wasa, Kiyotaka.; Kitabatake, Makoto. (Electronic resources)

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS by: Wasa, Kiyotaka.; Kanno, Isaku.; Kotera, Hidetoshi. (Electronic resources)

Subjects

Cathode sputtering (Plating process) Thin films. TS695 671.7/38 Thin films 621.3815/2

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