嶺東科技大學 |

登入

回首頁

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS

紀錄類型:	書目-電子資源 : 單行本
副題名:	fundamentals and applications for functional thin films, nano-materials and MEMS
其他作者:	WasaKiyotaka.,
其他作者:	KannoIsaku.,
其他作者:	KoteraHidetoshi.,
出版地:	Waltham, MA
出版者:	William Andrew;
出版年:	2012.
版本:	2nd ed.
面頁冊數:	xii, 644 p.ill. : 24 cm.;
標題:	Cathode sputtering (Plating process) - Handbooks, manuals, etc. -
標題:	Thin films - Handbooks, manuals, etc. -
電子資源:	http://www.sciencedirect.com/science/book/9781437734836
ISBN:	9781437734836electronic bk.
ISBN:	9781437734836

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS
Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS / edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera. - 2nd ed.. - Waltham, MA : William Andrew, 2012.. - xii, 644 p. ; ill. ; 24 cm..
Includes bibliographical references and index..
ISBN 9781437734836ISBN 9781437734836
Cathode sputtering (Plating process)Thin films -- Handbooks, manuals, etc. -- Handbooks, manuals, etc.

Wasa, Kiyotaka.

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS
LDR:00893clm 2200265 450 001 278603
005 20131125190035.0
009 13000260
010 1 $a 9781437734836 $b electronic bk.
010 1 $a 9781437734836
100 $a 20140221d2012 u y0engy01 b
101 0 $a eng
102 $a us
105 $a a a 001yy
135 $a v
200 0 $a Handbook of sputter deposition technology $e fundamentals and applications for functional thin films, nano-materials and MEMS $f edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera.
204 1 $a electronic resource
205 $a 2nd ed.
210 $a Waltham, MA $d 2012. $c William Andrew
215 1 $a xii, 644 p. $c ill. $d 24 cm.
320 $a Includes bibliographical references and index.
606 $a Cathode sputtering (Plating process) $x Handbooks, manuals, etc. $2 lc $3 297324
606 $a Thin films $x Handbooks, manuals, etc. $2 lc $3 297325
676 $a 671.7/38 $v 23
680 $a TS695 $b .W37 2012
702 1 $a Wasa $b Kiyotaka. $3 297321
702 1 $a Kanno $b Isaku. $3 297322
702 1 $a Kotera $b Hidetoshi. $3 297323
801 0 $a tw $c 20131203 $b ltu
801 1 $a tw $c 20131203 $b ltu
856 7 $u http://www.sciencedirect.com/science/book/9781437734836

筆 0 讀者評論

評論

Export

取書館別