Wasa, Kiyotaka.

[NT 60487] Overview

[NT 60478] Works:	1 [NT 60520] works in 2 [NT 60521] publications in 1 [NT 60522] languages

[NT 60480] Titles

Thin film materials technology : sputtering of compound materials [NT 59711] by: Adachi, Hideaki.; Wasa, Kiyotaka.; Kitabatake, Makoto. ([NT 8598] Electronic resources)

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS [NT 59711] by: Wasa, Kiyotaka.; Kanno, Isaku.; Kotera, Hidetoshi. ([NT 8598] Electronic resources)

[NT 60479] Subjects